Heated Pump Lines

The need for heated pump lines is driven by two main factors:

1) An increased need for operational equipment efficiency (OEE)

2) An increased use of exotic materials to achieve special results, such as deposition of low k and high k dielectric materials.

In the IC manufacturing process, exotic materials are often not efficiently reacted in the process chamber.  Therefore, heated exhaust lines are required to maintain the vapor state of the partially reacted by-products until they exit the vacuum system, where they can be properly abated.

The principle advantages of heated exhaust piping are:

  • Increased device yield, especially as more 'dirty' processes are developed while smaller feature sizes demand fewer particles added in-process.
  • Possible extension of process tools to finer feature sizes by creating less exhaust particle contamination.
  • Increased device yield, especially as more 'dirty' processes are developed while smaller feature sizes demand fewer particles added in-process.
  • Possible extension of process tools to finer feature sizes by creating less exhaust particle contamination.
  • Improved process stability since conductance of the exhaust piping does not degrade with time.
  • Reduced downtime costs, especially as equipment prices increase to well above $1-3 million.
  • Reduced risk of exposure to hazardous materials during exhaust line cleaning.
  • Reduced downtime and hazard exposure associated with cleaning vacuum traps.
  • Reduced downtime and maintenance cost associated with vacuum pumps.

Heated Gas Supply Lines
Exotic materials often require heated supply lines to assure delivery of reactant gases.
The principle advantages of heated supply piping are:

  • Ability to use reactants not otherwise available.
  • Improved process stability because the gas composition is maintained from the gas supply and mixing points to the point of use.
  • Reduce downtime costs.